NxStats: QoR Analysis Tool for Fractured Photomask Data

NxStats is unique and efficient analysis software to analyze the quality of the Fractured Photomask data generated by Mask Data Preparation Software. OPC and RET techniques sub 32nm node demand an extremely complex fracturing software to generate the fractured photomask targeted for mask manufacturing equipment. The quality of the fractured data has a huge impact on the quality and yield of manufactured photomask as well as the mask writing time.

NxStats analyzes the mask data for various parameters such as number of Figures, Shot count, sliver count, long sliver count, total sliver perimeter, CD violations etc. enabling MDP engineer to comprehensively and objectively analyze the quality of the fractured data. NxStats is based on the distributed environment and makes use of advanced algorithms while analyzing the quality of the mask data. The results of NxStats are written in a CSV file along with the external sliver and CD violations highlighted in a layout (GDSII/OASIS) file.

NxStats supports all major industry standard Mask file formats. NxStats is based on SoftJin’s widely deployed Nirmaan Polygonal Data Processing Platform with the industry’s fastest data import and export capabilities.


Key Benefits
  • Analysis of Quality of Fractured data
    • Unique Tool to analyze and compare the results of any fracturing software without any favour to any particular fracturing tool
    • Reports the shot count, sliver count, long sliver count etc
    • Reports the number of rectangles, triangles, and X, Y trapezoids
    • Highlights external sliver and CD violations in a layout file
    • Analysis based on multiple parameters simultaneously
  • Excellent throughput
    • Leverages distributed computing as well as multi-core infrastructure
    • Unlimited data handling capacity
  • Excellent price to performance ratio
    • Reduces MDP software cost
Key Features
  • Results of NxStats
    • NxStats reports the following statistics regarding the quality of the Fractured Mask Data
    • Shot count and figure count
    • Number of slivers, long slivers and sliver shots
    • Total sliver perimeter
    • Total perimeter of the shapes and shots
    • Total figure area, shot area and total sliver shot area
    • Number of Horizontal and Vertical CD Violations along with the violations highlighted in the layout file
    • Total external sliver count along with the external sliver violations highlighted in a layout file
    • Size and the type of geometries found in the input file
    • Number of rectangles, triangles, X-Trapezoids and Y-Trapezoids
    • Number of Trapezoids with one slant edge and the trapezoids with two slant edges
    • Number of trapezoids with one side and two sides (octangular edges)
    • Number of rectangular shots from rectangular shapes
    • Number of rectangular shots from triangular shapes
    • Number of triangle shots from the triangular shapes
    • Number of rectangular shots from the rectangle part of the trapezoid
    • Number of rectangular shots from the octangle part of the trapezoid
    • Number of triangle shots from the octangular part of the trapezoid
    • Number of rectangular and triangular slivers
    • Number of slivers in one side slant trapezoids and two side slant trapezoids
    • Number of slivers in 4 bins. Slivers are classified in 4 bins based on their size and the number of slivers in each bin is reported
  • Distributed computing support
    • Efficient use of distributed processing for better throughput
    • Intelligent partitioning and distribution of data across multiple cores
    • Customizable attributes in the user parameter file enabling user to control the distributed environment
  • Large Data Handling
    • Unlimited data handling capacity, capable of handling files of any size
    • Efficient and versatile geometric engine to support all-angle as well as positive and reverse tone data
  • User Interface
    • TCL based user scripting interface enables easy customization, configuration and integration
    • As part of SoftJin’s NxMDP tool-suite, NxStats has close integration with other tools including NxFracture (for fracturing the layout data to mask data), NxCompare (for layout / mask data equivalence check), and NxMRC (mask rule checker)
    • Integrated with Jedat’s Hotscope viewer (A high performance layout and mask data viewer)
  • Advanced operations on Input data
    • Scaling, Rotation, Translation, Mirroring and Tone Reversal options on the input data
    • Full chip, Window-specific, Cell-specific, and Layer specific options to filter out the input data for analysis
  • Supports Mask data formats
    • Input mask formats - JEOL 52(V3.1), VSB-12, and OASIS.MASK
  • Backed by SoftJin’s customized software development and integration services to meet specific needs and customizations for Equipment vendors and end-customers
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