NxDAT : Defect Analysis Tool
NxDAT is software for efficient Analysis, Classification and Trend Analysis of Defects identified by Mask Inspection Systems. The software includes features for easy and fast defect navigation, visual display, defect classification, clustering and sophisticated CD analysis. NxDAT also includes features for analysis over multiple Inspections, Repeatability and Trend Analysis. These features along with automatic generation of reports, charts, image mosaics and paretos significantly improve the productivity of the mask inspection operators and reduce unnecessary mask repairs and re-runs.NxDAT’s unique “open architecture” makes it easily extensible to support multiple Inspection and Metrology tools from different vendors. A unique Plug-In interface to NxDAT enables Users to add their own proprietary defect analysis and image processing algorithms as well. Based on SoftJin’s Nirmaan Post Layout Software Development Platform, NxDAT combines Mask Inspection and Design worlds by supporting correlation of defect data on reticles with CAD data in several major industry standard Layout and Mask Data formats.
Key Features
- User Friendly Defect Display, Filtering, Navigation and Classification
- Sophisticated Image Measurement and Analysis Features
- Open Architecture to support multiple tools in the Mask Shops and Wafer Fabs
- Combines Mask Inspection and Design worlds by supporting correlation of Defect and CAD data
- Repeatability, Trend Analysis and Versatile Report Generation
Backed by SoftJin’s proven customized software development and integration services to meet specific needs and customizations for OEMs and end-customers.

