NxDAT : Defect Analysis Tool

NxDAT is software for efficient Analysis, Classification and Trend Analysis of Defects identified by Mask Inspection Systems. The software includes features for easy and fast defect navigation, visual display, defect classification, clustering and sophisticated CD analysis. NxDAT also inclused features for analysis over multiple Inspections, Repeatability and Trend Analysis. These features along with automatic generation of reports, charts, image mosaics and paretos significantly improve the productivity of the mask inspection operators and reduce unnecessary mask repairs and re-runs.

NxDAT’s unique “open architecture” makes it easily extensible to support multiple Mask Inspection and Metrology tools from different vendors. A unique Plug-In interface to NxDAT enables Users to add their own proprietary defect analysis and image processing algorithms as well. Based on SoftJin’s Nirmaan Post Layout Software Development Platform, NxDAT combines Mask Inspection and Design worlds by supporting correlation of defect data on reticles with CAD data in several major industry standard Layout and Mask Data formats.

Key Benefits
  • High throughput, User Friendly Mask Defect Analysis Tool
    • Defect navigation, filtering, selection, classification and measurement
    • Image Analysis with cross-section and CD analysis
    • Supports Multiple Inspections, Repeatability Analysis
    • Charts, reports, graphs, paretos generation
  • Applicable for both mask shops and wafer fabs
    • Supported Defect Analysis Types – D2D, D2DB, Contamination
  • Unique Open architecture
    • User can add proprietary plug-ins customized to their needs
    • Easily extensible to support multiple Mask Inspection and Metrology Tools
  • Combines Mask Inspection and Design worlds
    • Supports correlation of defect data with major industry standard Layout/Mask data formats
Key Product Features
  • Visual Display and selection of Defects through Defect Map
    • Intuitive rubber band selection of group of defects
    • Optional overlay of Reticle image, Die-cycle
  • Detailed Defect List Display with one-to-one correspondence with Defect Map
    • Displays all fields related to every defect
  • Easy Navigation through the Defects through multiple intuitive ways
    • Fast navigation – display refresh less than 1 sec
  • Automatic identification of cluster of defects
    • Allows user to deal with clusters in Defect Map and Defect List
  • Selection / Filtering of Defects based upon multiple criteria including user definable criteria
  • Convenient Classification features
    • User definable Classification coding
    • Multi-tier Classification (eg. on defect type and defect disposition)
    • One click classification of a group of defects
  • Sophisticated Image Measurement and Analysis Unit
    • Multiple modes of Display of Defect, Reference and Functional images
    • Cross-section analysis, CD Measurement, CD Variability analysis
    • Contact Measurement analysis
    • ADR images display and analysis
    • Importing and attaching of external images with defects
  • Open Architecture to support multiple tools in the Mask Shops and Wafer Fabs
    • Currently supports Applied Materials’ Aera2 Mask Inspection System
    • Open Architecture Interface designed to support multiple Mask Inspection and Metrology Tools
    • Easily extensible to correlate/ overlay the defects detected by Mask Inspection and Wafer Inspection Tools
    • Easily extensible to support other tools such as Metrology, CD-SEM, repair tools etc.
  • Unique Plug-in Interface allows Users to perform automated defect analysis based on proprietary methods
  • Correlation of Defects with Pre-OPC, Post-OPC, CAD Data
    • Generates image clips of layout data pattern and correlates with defect and reference images
    • Supports both binary and PSM masks
    • Design data formats – GDSII, OASIS
    • Mask data formats – MEBES, OASIS.MASK, MEBES.JOBDECK
  • Automatic grid detection and detection line identification in test masks
  • Versatile Reports generation including printing of charts, tables, graphs, paretos
  • Allows Incremental Analysis of defect files
  • Intuitive and User Friendly GUI
    • Dockable widgets for each major function
    • Customizable configuration of window widgets
    • Tool-tip based information for most features
  • Command-Line Interface
    • Actions through GUI can be recorded and re-played without opening GUI
  • Backed by SoftJin’s proven customized software development and integration services to meet specific needs and customizations for OEMs and end-customer


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