NxDAT : Defect Analysis Tool

NxDAT is software for efficient Analysis, Classification and Trend Analysis of Defects identified by Mask Inspection Systems. The software includes features for easy and fast defect navigation, visual display, defect selection and filtering, defect classification, clustering, sophisticated CD analysis, analysis over multiple Inspections, Repeatability and Trend Analysis. These features along with automatic generation of reports, charts, graphs, image mosaics and paretos significantly improve the productivity of the mask inspection operators. The software supports several types of defect analyses including Die-to-Die and Die-to-Database thereby making it applicable at both Mask Shops and Wafer Fabs. The features such as automatic grid detection, comparison of actual detection line against the expected detection line and repeatability analysis on test masks allow NxDAT to be used also for calibrating the Mask Inspections Systems to check their defect detection capabilities.

NxDAT’s “open architecture” makes it easily extensible to support multiple Mask Inspection tools from different vendors. A unique Plug-In interface to NxDAT enables Users to add their own proprietary defect analysis and image processing algorithms as well. Based on SoftJin’s Nirmaan Post Layout Software Development Toolkit Platform, NxDAT combines Mask Inspection and Design Automation worlds by supporting correlation of defect data on reticles with Design layout data in any major industry standard Layout and Mask Data formats.

Key Benefits
  • High throughput, User Friendly Mask Defect Analysis Tool
    • Easy and fast defect navigation, defect selection, filtering, classification and measurement
    • Image Analysis with cross-section and CD analysis
    • Supports Multiple Inspections, Repeatability Analysis
    • Charts, reports, graphs, paretos generation
  • Common Mask Defect Analysis software applicable for both mask shops and wafer fabs
    • Types – D2D, D2DB, Contamination
  • Open architecture
    • Customers can add proprietary plug-ins
    • Can be extended to support multiple Mask Inspection Tools
    • Currently supports Applied Materials’ Aera2 Mask Inspection System
  • Combines Mask Inspection and Design Automation worlds
    • Supports correlation of defect data with Layout/Mask data
    • Design Database – GDSII, OASIS
    • Mask Data – MEBES, OASIS.VSB
Key Product Features
  • Visual display of defects through Defect Map

    Visual display of defects through Defect Map.
    * Various types of zooming, Scrolling, Tool tips
    * Coordinate system display
    * Optional overlay of Reticle image, Die-cycle
    * Isolated and Clustered defects
    * Cursor selection of Defect-to-be-analyzed
    * Rubber-band selection of a group of defects

  • Defect List

    Defect List
    * One-to-one correspondence with Defect Map
    * Display of all fields related to every defect
    * Isolated and Clustered defects
    * Selection of multiple defects through mouse clicks

  • Easy and Fast Navigation

    Easy and Fast Navigation
    * Navigation to arbitrary defect through Defect Map or Defect List or Defect Number
    * Sequential browsing through defects using specially designated buttons
    * Specifying defect location through X,Y coordinates
    * Fast navigation through defects – typically less than 1 sec

  • Defect Classification

    Defect Classification
    * User definable classification coding
    * Classification of Defects into different types
    * Classifying a group of defects with one click
    * Annotating defects with comments

  • Selection / Filtering of Defects based upon various criteria

    Selection / Filtering of Defects based upon various criteria
    * Defect Status – located, unlocated, confirmed
    * Defect Codes
    * Detector types
    * User definable selection criteria – User can add customized criteria by modifying the calibration file

  • Sophisticated Image Measurement and Analysis with Cross Section and CD Analysis

    Sophisticated Image Measurement and Analysis with Cross Section and CD Analysis
    * Display of Defect and Reference images in different modes – original, stretched, binary, colored, inverted
    * Functional image – user definable function of input (e.g. defect and reference) images
    * Cross-section analysis
       o Fixed mode and Free mode operations
       o Orthogonal as well as any-angle cross sections
    * CD Measurement, CD Variability analysis
    * Ruler capability on images
    * ADR images display and analysis

  • Repeatability Analysis

    Repeatability Analysis
    * Display of Capture rate, Defect count etc.
    * Adders analysis – added, missing and common defects
    * Defect trend – growing, shrinking, stable
    * Generation of charts and tables for all types of analyses
    * Selecting Single Inspection (SI) or Multiple Inspection (MI) folders

  • Correlation with Pre-OPC, Post-OPC, Mask Layout Data

    Correlation with Pre-OPC, Post-OPC, Mask Layout Data
    * Collects image clips of layout data pattern and correlates with defect and reference images
    * Supports both binary and PSM masks
    * Design data formats – GDSII, OASIS
    * Mask data formats – MEBES, OASIS.VSB

  • Plug-in Interface

    Plug-in Interface
    * Users can add their own proprietary plug-ins
    * Two plug-in interface types – first, for processing all defects; second, for processing a set of selected defects

  • Open Architecture

    Open Architecture
    * Currently supports Applied Materials’ Aera2 Mask Inspection System
    * NxDAT can be extended to support multiple Mask Inspection Tools
    * NxDAT can be extended to correlate/ overlay the defects detected by Mask Inspection and Wafer Inspection Tools
    * NxDAT can be extended to support other tools such as CD-SEM, repair tools etc.

  • User Friendly GUI

    User Friendly GUI
    * Each major feature is displayed in dockable window widget – can be docked in and out
    * Configurable widgets – customizable configuration of window widgets
    * The configuration of widgets can be saved across the sessions
    * Standard and Intuitive Look-and-Feel
    * Tool-tip based information for most features

  • Command-Line Interface

    Command-Line Interface
    * Most of the actions through GUI have equivalent text commands
    * Actions through GUI can be recorded and re-played
    * Standard scripts can be run on the defect files without opening the GUI

  • Other Features

    Other Features
    * Automatic identification of cluster of defects
    * Automatic grid detection and detection line identification in test masks
    * Calibration file editing
    * Reports generation
    * Printing of charts, tables, graphs, paretos
    * Merging of defect files



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